3

Defects in SIMOX structures: causes and solutions

Year:
1991
Language:
english
File:
PDF, 3.06 MB
english, 1991
5

Nucleation and growth of oxide precipitates in silicon implanted with oxygen

Year:
1986
Language:
english
File:
PDF, 2.18 MB
english, 1986
7

Ultraviolet radiation induced defect creation in buried SiO2 layers

Year:
1991
Language:
english
File:
PDF, 578 KB
english, 1991
27

Self-Interstitial Migration in Si Implanted with Oxygen

Year:
1987
Language:
english
File:
PDF, 563 KB
english, 1987
31

Defects in SIMOX structures: some process dependence

Year:
1992
Language:
english
File:
PDF, 1.14 MB
english, 1992
41

Ion Implantation Technology–92 || SIMOX material manufacturability

Year:
1993
Language:
english
File:
PDF, 1.49 MB
english, 1993